Electron cyclotron resonance plasma enhanced sputtering system.

An electron cyclotron resonance plasma enhanced sputtering system glows behind University of Vermont Professor Walter Varhue, left, and Post Doctorate and Fellow Mike Cross, right, at the Semiconductor Processing Lab on campus, in Burlington, Vt. where Varhue and a team of scientists continue the search for an economical and environmentally friendly source of hydrogen for power.

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